Means for supporting a mask

Details Means for supporting a mask Means for supporting a mask

1998-05-28

1999-12-21

Berger, Derek J.

Supports

Resilient support

Adjustable preloading of resilient means

248581, 355 76, 355 72, F16M 1300, G03B 2758, G03B 2762

Patent

active

060038284

ABSTRACT:
To prevent tilting or bending of a large mask frame holder and at the same time to prevent distortion when the mask holding frame is attached to a support base by ball plungers in three of the four corner areas of a mask holding frame that engage V groove bodies which face the ball plungers on the surface of the base, compression springs are provided in those three corners which pre-stress the mask holding frame toward the support base while a compression spring is provided between the remaining corner area of the mask holding frame and the base which acts in a direction pressing the mask holding frame away from the support base, thereby preventing the mask holding frame from bending or tilting. As an alternative, in each of the three pre-stressed corner areas of the mask holding frame, instead of a compression spring, an elastic attachment component in the form of a bracket with spring-like legs mounted to the supporting component can be provided.

REFERENCES:
patent: 4185915 (1980-01-01), Volent et al.
patent: 4764791 (1988-08-01), Omata et al.
patent: 4888488 (1989-12-01), Miyake
patent: 5157438 (1992-10-01), Beale
patent: 5544213 (1996-08-01), Chiba et al.
patent: 5602622 (1997-02-01), Ziegler

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