Means for providing uniform illumination to a light sensitive el

Details Means for providing uniform illumination to a light sensitive el Means for providing uniform illumination to a light sensitive el

1981-05-01

1982-12-07

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Illumination systems or details

G03B 2772

Patent

active

043623840

ABSTRACT:
In a ring field projection optical system for imaging a mask on a wafer the illumination source has readily adjustable means for obtaining uniform exposure along the length of the arcuate zone of illumination.

REFERENCES:
patent: 3594081 (1971-07-01), Tschink
patent: 3722980 (1973-03-01), Craig
patent: 3907427 (1975-09-01), Tschink et al.
patent: 3967895 (1976-07-01), Crook
patent: 4068947 (1978-01-01), Buckley et al.
patent: 4080057 (1978-03-01), Nakane et al.
patent: 4125323 (1978-11-01), Ikeda et al.

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