Means for forming SOI

Details Means for forming SOI Means for forming SOI

2006-09-05

2006-09-05

Schillinger, Laura M. (Department: 2813)

Semiconductor device manufacturing: process

Bonding of plural semiconductor substrates

C438S311000, C438S149000

Reexamination Certificate

active

07101772

ABSTRACT:
A method for forming a SOI structure in which porous silicon is sealed and an epitaxial layer is grown thereover, followed by implantation of oxygen and annealing.

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