MBE process for preparing oxide superconducting films

Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – Coating

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

505729, 505730, 505473, 427 62, 427575, 427576, 4271263, 427314, B05D 306, B05D 512

Patent

active

053507371

ABSTRACT:
In a process for preparing a thin film of oxide superconductor having a layered crystal structure by depositing each layer of said layered crystal structure on a substrate by Molecular Beam Epitaxy (MBE) method with introducing oxygen-containing gas which is excited by irradiation of microwave, improvement in that a film-forming operation by the MBE method is interrupted temporarily after predetermined numbers of constituent layers which correspond to one unit crystal or less than one unit crystal are layered so that the deposited constituent layers are left in an activated oxygen atmosphere to effect a crystallization promotive operation, before the next film-forming operation is restarted.

REFERENCES:
Japanese Journal of Applied Physics, vol. 28, No. 10, Nakayama et al, "Epitaxial growth of Bi-Sr-Ca-Cu-O thin films by molecular beam epitaxy technique with shutter control," pp. 1809-1811 (Oct. 1989).
Journal of Vacuum Science and Technology: Part B, vol. 7, No. 2, Eckstein et al, "Epitaxial growth of high-temperature superconducting thin films," pp. 319-323 (Mar. 1989).
Journal of Crystal Growth, vol. 95, No. 1-4, Harris et al, "MBE growth of high critical temperature superconductors," pp. 607-616 (Feb. 11, 1989).
Journal of Crystal Growth, vol. 102, No. 3, Schlom et al, "Molecular beam epitaxial growth of layered Bi-Sr-Ca-Cu-O compounds," pp. 361-375 (May 1990).
Webb et al, "Growth of High Tc Superconducting Thin Films Using Molecular Beam Epitaxy Technique", Appl. Phys. Lett. 51(15) Oct. 1987 pp. 1191-1193.
Eckstein et al, "Atomically Layered Heteroepitaxial Growth of Single-Crystal Films of Superconducting Bi.sub.2 Sr.sub.2 Ca.sub.2 Cu.sub.3 O.sub.x," Appl. Phys. Lett. 57(9) Aug. 1990, pp. 931-933.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

MBE process for preparing oxide superconducting films does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with MBE process for preparing oxide superconducting films, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MBE process for preparing oxide superconducting films will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1265504

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.