MBE apparatus with photo-cracker cell

Details MBE apparatus with photo-cracker cell MBE apparatus with photo-cracker cell

1994-05-26

1995-07-18

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

With treating means

118723VE, 118725, 118726, 219390, C23C 1600

Patent

active

054337917

ABSTRACT:
Ultraviolet (UV) light from a lamp or UV laser, such as a metal can short arc xenon lamp or excimer laser, respectively, is provided for cracking Group V and Group VI species comprising clusters (dimers and tetramers) or metal-organic molecules to form monomers (atoms). The UV radiation interacts with a molecular beam of Group V and Group VI species subsequent to their generation in a source cell and thermal cracking. The source cell may comprise an effusion source in molecular beam epitaxy (MBE) apparatus, a thermal cracker cell in gas-source MBE apparatus, or a gas injector cell in metal-organic MBE apparatus (MOMBE). Light from the UV lamp or laser is coupled into a vacuum chamber in which the source cell is located, at a point below the source cell and is then directed along a path parallel to the source cell by a first reflector and finally directed onto the thermally-cracked beam of molecules by a second reflector, where the UV radiation photo-cracks the molecular beam.

REFERENCES:
patent: 5041719 (1991-08-01), Harris et al.
patent: 5156815 (1992-10-01), Streetman et al.
patent: 5298759 (1994-03-01), Brewer et al.

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