Materials for imprint lithography

Details Materials for imprint lithography Materials for imprint lithography

2004-02-23

2011-12-13

Egwim, Kelechi (Department: 1762)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Compositions to be polymerized by wave energy wherein said...

C522S074000, C522S099000, C526S206000, C526S279000

Reexamination Certificate

active

08076386

ABSTRACT:
The present invention is directed to a material for use in imprint lithography that features a composition having a viscosity associated therewith and including a surfactant, a polymerizable component, and an initiator responsive to a stimuli to vary the viscosity in response thereto, with the composition, in a liquid state, having the viscosity being lower than about 100 centipoises, a vapor pressure of less than about 20 Torr, and in a solid cured state a tensile modulus of greater than about 100 MPa, a break stress of greater than about 3 MPa and an elongation at break of greater than about 2%.

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