Material supplying apparatus

Details Material supplying apparatus Material supplying apparatus

1994-12-19

1996-12-10

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

118723E, 118726, A01K 1504

Patent

active

055826474

ABSTRACT:
A material supplying apparatus includes a container for storing a solution; an inlet pipe for introducing a carrier gas and an outlet pipe; electrodes disposed in the container over the depth direction of the container and forming a capacitor; and apparatus for calculating a residual amount of the solution in the container from the capacitance of the capacitor formed by the electrodes. The solution is used as the dielectric of the capacitor formed in the container and the capacitance varies according to the quantity of solution so that the residual amount of the solution and the time to replenish the solution are calculated in a simple structure having no moving parts.

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