Material handling and transport process

Details Material handling and transport process Material handling and transport process

2006-12-26

2006-12-26

Keenan, James (Department: 3652)

Material or article handling

Load support has linear vertical movement and additional...

Additional movement is rotational

C414S806000, C414S940000

Reexamination Certificate

active

07153083

ABSTRACT:
A material handling and transport system and process for moving a substrate carrier between storage and processing destinations are provided. The system includes a vehicle that runs on a support structure, such as a pathway or a track assembly supported on the floor, which may be in a pressurized tunnel. A carrier nest on the vehicle receives and supports the carrier. A lifting mechanism on the vehicle vertically raises and lowers the carrier nest. A load port support surface is disposed vertically above the support structure. The carrier is raised through an opening in the load port support surface. A load port nest on the load port support surface receives and supports the carrier adjacent a selected destination. A carrier manipulation mechanism manipulates the carrier over the load port nest. The lifting mechanism then lowers the carrier onto the load port nest. The system is particularly suited for handling and transporting semiconductor wafer carriers.

REFERENCES:
patent: 4649830 (1987-03-01), Tanaka
patent: 4682927 (1987-07-01), Southworth et al.
patent: 4904153 (1990-02-01), Iwasawa et al.
patent: 5064331 (1991-11-01), Yamaguchi et al.
patent: 5098244 (1992-03-01), Stimson
patent: 5116182 (1992-05-01), Lin
patent: 5372241 (1994-12-01), Matsumoto
patent: 5399531 (1995-03-01), Wu
patent: 5454328 (1995-10-01), Matsuzaki et al.
patent: 5957648 (1999-09-01), Bachrach
patent: 5964561 (1999-10-01), Marohl
patent: 5980183 (1999-11-01), Fosnight
patent: 6169935 (2001-01-01), Iwasaki et al.
patent: 6235634 (2001-05-01), White et al.
patent: 6354781 (2002-03-01), Pan
patent: 6679671 (2004-01-01), Blonigan et al.
patent: 6712577 (2004-03-01), Davis et al.
patent: 2376938 (2002-12-01), None
patent: 3-248433 (1991-11-01), None
patent: 5-17006 (1993-01-01), None

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