Material for semiconductor holder in electron beam writing appar

Details Material for semiconductor holder in electron beam writing appar Material for semiconductor holder in electron beam writing appar

1982-12-14

1984-04-10

Rutledge, L. Dewayne

Alloys or metallic compositions

Chromium base

C22C 2706

Patent

active

044420676

ABSTRACT:
Material for semiconductor holder in electron beam writing apparatus is disclosed. The material consists of 1.0-11.0% by weight of iron, 0.2-5.5% by weight of Manganese, 0.0001-1.0% by weight of at least one rare earth element selected from rare earth elements, and remainder of chromium and inevitable impurity, the material having magnetic susceptibility of not more than 5.times.10.sup.-5 emu/G and a thermal expansion coefficient of 0-4.0.times.10.sup.-6 /.degree. C. at a temperature of 0.degree. C.-40.degree. C.

REFERENCES:
patent: 3015559 (1962-01-01), McGurty et al.
patent: 3017265 (1962-01-01), McGurty et al.
patent: 4089711 (1978-05-01), Saito et al.

Affiliated with

Also associated with

Rating

Material for semiconductor holder in electron beam writing appar does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Material for semiconductor holder in electron beam writing appar, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Material for semiconductor holder in electron beam writing appar will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-892236