Material for purification of semiconductor polishing slurry,...

Details Material for purification of semiconductor polishing slurry,... Material for purification of semiconductor polishing slurry,...

2004-03-18

2009-12-01

Rose, Robert (Department: 3727)

Abrading

Abrading process

Glass or stone abrading

C210S679000, C210S681000

Reexamination Certificate

active

07625262

ABSTRACT:
A material for purification of a semiconductor polishing slurry that without changing of pH value, is capable of efficiently purifying a polishing slurry to thereby not only prevent metal contamination of a polished object as effectively as possible but also achieve recycling of a polishing slurry without any problem; a relevant module for purification of a semiconductor polishing slurry; and a process for purifying a semiconductor polishing slurry with the use thereof. In particular, a material for purification of a semiconductor polishing slurry characterized in that it comprises a fibrous substrate having a functional group capable of forming a metal chelate or such a functional group together with hydroxyl fixed onto at least the surface thereof. This material for purification of a semiconductor polishing slurry is, for example, used in such a manner that it is inserted in a container fitted with polishing slurry inflow port and outflow port while ensuring passage of polishing slurry flow.

REFERENCES:
patent: 4500396 (1985-02-01), D'Agostino et al.
patent: 4514367 (1985-04-01), Asami et al.
patent: 1179627 (2002-02-01), None
patent: 09-314466 (1997-12-01), None
patent: 11-186201 (1999-07-01), None
patent: 2000-248467 (2000-09-01), None
patent: 2004-075859 (2004-03-01), None

Affiliated with

Also associated with

Rating

Material for purification of semiconductor polishing slurry,... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Material for purification of semiconductor polishing slurry,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Material for purification of semiconductor polishing slurry,... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4138780