Material for measuring static and dynamic physical parameters

Compositions: ceramic – Ceramic compositions – Yttrium – lanthanide – actinide – or transactinide containing

Reexamination Certificate

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C501S095200, C501S095300, C501S097300, C501S097400, C501S103000, C501S104000, C501S108000, C501S118000, C501S120000, C501S121000, C501S135000, C501S138000, C501S139000

Reexamination Certificate

active

06534430

ABSTRACT:

CROSS-REFERENCES TO RELATED APPLICATIONS
The present application claims priority under 35 U.S.C. §119 to Japanese Patent Application No. 2000-051120, filed Feb. 28, 2000, entitled “MATERIAL FOR MEASURING STATIC AND DYNAMIC PHYSICAL PARAMETERS”. The contents of this application are incorporated herein by reference in their entirety.
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a material used as a sensor that configures a sensor for measuring a static and dynamic physical parameter such as force, pressure, torque, speed, acceleration, position, displacement, impact force, weight and mass, degree of vacuum, rotational force, vibration or noise.
2. Related Arts
Conventionally, there has been known a semiconductor silicon single crystal and silicon carbide or the like as a constituent material for a sensor that can measure a static and dynamic physical parameter such as force, pressure, torque, speed, acceleration, position, displacement, impact force, weight and mass, degree of vacuum, rotational force, vibration or noise, via a distortion (stress), that is, a material having a piezoresistance.
In addition, as a piezoresistance material, there is also known La
1−x
Sr
x
MnO
3
or the like that is a pervskite type composite oxide.
The piezoresistance used here denotes a phenomenon in which, when a compression stress, a tensile stress, a shear stress, or static hydraulic stress are applied to a material, an electrical resistance of a material changes.
However, a conventional material is low in mechanical strength, and thus, has been hardly used as a constituent element of a sensor used for measurement under a high pressure and a high load. Therefore, a material for measuring physical parameters made of such a conventional material has been subjected to measurement under a high pressure and a high load by putting it in a proper pressure resistance container.
Thus, there has been a problem with a complicated sensor construction and higher cost.
SUMMARY OF THE INVENTION
It is an object of the present invention to provide a sensor material for measuring physical parameters capable of configuring a sensor capable of directly measuring a high value of physical parameters such as high stress or high pressure without employing a pressure resistance container.
According to one aspect of the invention, the sensor material for measuring static and dynamic physical parameters includes a matrix made of an electrically insulating ceramic material, and piezoresistance materials which are dispersed in the matrix so as to be electrically continuous to each other.


REFERENCES:
patent: 5132583 (1992-07-01), Chang
patent: 5510304 (1996-04-01), Willkens
patent: 5854157 (1998-12-01), Hwang et al.
patent: 5985183 (1999-11-01), Hori et al.
patent: 52-040793 (1977-03-01), None
patent: 04-053206 (1992-02-01), None

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