Material for an insulating film, coating varnish for an...

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Mixing of two or more solid polymers; mixing of solid...

Reexamination Certificate

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C525S184000, C525S421000, C525S424000, C525S425000, C524S514000, C524S538000

Reexamination Certificate

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07049371

ABSTRACT:
A material for an insulating film which comprises a copolymer obtained by reacting a polyamide having a specific structure and a reactive oligomer as a component forming the film; a coating varnish for an insulating film which comprises this material and an organic solvent; an insulating film which comprises a layer of a resin comprising as a main structure a polybenzoxazole which is obtained by treating the above material or the above coating varnish by heating so that condensation reaction and crosslinking reaction take place and has fine pores; and a semiconductor device which comprises an insulating interlayer film for multi-layer wiring comprising the insulating film and/or a surface protective film comprising the insulating film. Excellent electrical, thermal and mechanical properties are exhibited and a low permittivity can be achieved.

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T. Hashimoto, M. Shibayama, M. Fujimura and H. Kawai, Microphase Separation and the Polymer-Polymer Interphase in Block Polymers, “Block Copolymers-Science and Technology”, p. 63, Ed. By D.J. Meier (Academic Pub., 1983).

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