Matching optical metrology tools using diffraction signals

Details Matching optical metrology tools using diffraction signals Matching optical metrology tools using diffraction signals

2006-05-22

2008-11-04

Punnoose, Roy M (Department: 2886)

Optics: measuring and testing

Dimension

C356S388000

Reexamination Certificate

active

07446888

ABSTRACT:
Optical metrology tools in a fleet of optical metrology tools can be matched using transforms. In particular, a first set of measured diffraction signals is obtained. The first set of measured diffraction signals was measured using a first optical metrology tool from the fleet of optical metrology tools. A second set of measured diffraction signals is obtained. The second set of diffraction signals was measured using a second optical metrology tool from the fleet of optical metrology tools. A reference diffraction signal is obtained. A first transform is generated based on the first set of measured diffraction signals and the reference diffraction signal. A second transform is generated based on the second set of measured diffraction signals and the reference diffraction signal.

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