Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – For fault location
Reexamination Certificate
2006-09-28
2009-06-30
Nguyen, Vincent Q (Department: 2831)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
For fault location
C324S600000, C333S032000
Reexamination Certificate
active
07554334
ABSTRACT:
Embodiments of a method of calculating the equivalent series resistance of a matching network using variable impedance analysis and matching networks analyzed using the same are provided herein. In one embodiment, a method of calculating the equivalent series resistance of a matching network includes the steps of connecting the matching network to a load; measuring an output of the matching network over a range of load impedances; and calculating the equivalent series resistance of the matching network based upon a relationship between the measured output and the load resistance. The load may be a surrogate load or may be a plasma formed in a process chamber.
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Dinev Jivko
Hoffman Daniel J.
Lane Steven
Merry Walter R.
Shannon Steven C.
Applied Marterials, Inc.
Moser IP Law Group
Nguyen Vincent Q
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