Wave transmission lines and networks – Automatically controlled systems – Impedance matching
Patent
1985-05-20
1987-07-07
Gensler, Paul
Wave transmission lines and networks
Automatically controlled systems
Impedance matching
333 32, 336229, 361299, H03H 740
Patent
active
046790071
ABSTRACT:
A matching circuit is provided for delivering radio frequency electromagnetic energy from a radio frequency power supply to a variable impedance load such as a gas plasma. The matching network couples and impedance matches the power supply to the load. The matching network includes a ratio circuit for establishing a voltage ratio between the power supply and the load and a tuning circuit for tuning out a complex portion of the reactance of the load. Separation and control of the ratio and tuning variables is achieved through provision of a ratio control circuit comprising a lumped quarter wave transformer and a tuning control circuit comprising a variable tuning capacitance and a tuning inductance electrically connected in parallel to the load. The lumped quarter wave transformer comprises first and second ratio inductances electrically connected parallel to the load; a first variable ratio capacitance electrically connected in series with the load; and second and third variable ratio capacitances electrically connected parallel to the load. Ratio and tuning inductances are provided comprising toroidal-shaped forms having layers of electrically conductive material deposited or applied thereover. The ratio and tuning capacitances are provided with electrically floating butterfly-shaped rotors ganged on drive shafts driven by high speed torque motors.
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Reese George
Schatz Douglas
Spielmaker Richard
Advanced Energy, Inc.
Gensler Paul
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