Matching circuit for delivering radio frequency electromagnetic

Wave transmission lines and networks – Automatically controlled systems – Impedance matching

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Details

333 32, 336229, 361299, H03H 740

Patent

active

046790071

ABSTRACT:
A matching circuit is provided for delivering radio frequency electromagnetic energy from a radio frequency power supply to a variable impedance load such as a gas plasma. The matching network couples and impedance matches the power supply to the load. The matching network includes a ratio circuit for establishing a voltage ratio between the power supply and the load and a tuning circuit for tuning out a complex portion of the reactance of the load. Separation and control of the ratio and tuning variables is achieved through provision of a ratio control circuit comprising a lumped quarter wave transformer and a tuning control circuit comprising a variable tuning capacitance and a tuning inductance electrically connected in parallel to the load. The lumped quarter wave transformer comprises first and second ratio inductances electrically connected parallel to the load; a first variable ratio capacitance electrically connected in series with the load; and second and third variable ratio capacitances electrically connected parallel to the load. Ratio and tuning inductances are provided comprising toroidal-shaped forms having layers of electrically conductive material deposited or applied thereover. The ratio and tuning capacitances are provided with electrically floating butterfly-shaped rotors ganged on drive shafts driven by high speed torque motors.

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Mazza, Automatic Impedance Matching System for RF Sputtering, IBM J. Res. Develop., vol. 14, No. 2, Mar. 1970.

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