Mastering machine having non-repetitive runout compensation

Details Mastering machine having non-repetitive runout compensation Mastering machine having non-repetitive runout compensation

1996-03-08

1998-10-20

Young, W. R.

Dynamic information storage or retrieval

With servo positioning of transducer assembly over track...

Optical servo system

369 52, 369 54, 369219, G11B 700

Patent

active

058257306

ABSTRACT:
A mastering machine comprises a turntable being capable of holding a master disk, a detector disposed in noncontact with the turntable for detecting repetitive runout amount of the turntable in the radial direction thereof, a non-repetitive runout amount calculator for calculating a non-repetitive runout amount in the radial direction of the turntable on the output of the detector, a projector for projecting an exposure beam to the master disk held by the turntable and a compensation unit for adjusting the position of the exposure beam projected to the master disk on the basis of a signal from the non-repetitive runout amount calculator.

REFERENCES:
patent: 4764914 (1988-08-01), Estes et al.
patent: 5121374 (1992-06-01), Barton et al.
NSK Air Bearing Unit Catalogue, Cat. No. V1390b, 1994E-1, p. 6, 1990.
Japanese Society For Precision Engineering-58-06, '92-06-1053, "An Evaluation Method of Radial Accuracy For Ultrahigh Precision Air Spindle".

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