Master transport apparatus

Details Master transport apparatus Master transport apparatus

2005-08-16

2005-08-16

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C700S121000, C700S213000, C700S228000, C700S245000, C414S222090, C414S226050

Reexamination Certificate

active

06930762

ABSTRACT:
An exposure apparatus has a mask stage (9), a prealignment device (7) which prealigns a mask (1) to be transferred to the stage (9), and a manipulating mechanism (10) which transports a master or exchanges two masters between the stage (9) and prealignment device (7). A master transport apparatus (30) includes a mask transport mechanism (8) which holds the mask (1) with holding portions (8a, 8b) that can hold at least two masks (1) and transports the master (1), and a controller (11) which controls the transport mechanism (8). The controller (11) controls the transport mechanism (8) such that, when a mask (1) that should be used in a first turn for exposure is to be mounted on the stage (9), a mask (1) to be used in a second turn is provided to the prealignment device (7), and a mask (1) to be used in a third turn is held by the holding portion (8a, 8b).

REFERENCES:
patent: 5740052 (1998-04-01), Nakamura
patent: 6414744 (2002-07-01), Kuiper et al.
patent: 6573979 (2003-06-01), Yamada
patent: 6642997 (2003-11-01), Yamada
patent: 6826451 (2004-11-01), del Puerto et al.

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