Optical: systems and elements – Optical amplifier
Reexamination Certificate
2007-07-17
2007-07-17
Hellner, Mark (Department: 3663)
Optical: systems and elements
Optical amplifier
C372S025000, C359S637000, C359S638000
Reexamination Certificate
active
11654780
ABSTRACT:
The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.
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Govorkov Sergei V.
Hua Gongxue
Misuryaev Timur
Paetzel Rainer
Schmidt Thomas
Hellner Mark
Lambda Physik AG
Stallman & Pollock LLP
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