Master holder of stamper electroforming apparatus and electrofor

Electrolysis: processes – compositions used therein – and methods – Electroforming or composition therefor – Recording device

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204297R, C25D 110, C25D 1706

Patent

active

051677920

ABSTRACT:
Disclosed are a master holder of a stamper electroforming apparatus and an electroforming method using this master holder. The master holder is for use in a stamper electroforming apparatus that forms a metal film by electroforming on a conductive film formed on a master having a minute relief pattern on its surface; and this master includes: a contact ring for electrically connecting the conductive film to a power source; and a structure for controlling the rate at which the metal film is formed, which structure is provided on the contact ring and adapted to control the metal-film-formation rate such that the thickness of a peripheral portion of the metal film gradually decreases in the vicinity of the contact ring.

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