Mass spectrometer for analyzing ultra trace element using plasma

Details Mass spectrometer for analyzing ultra trace element using plasma Mass spectrometer for analyzing ultra trace element using plasma

1992-03-10

1993-02-09

Berman, Jack I.

Radiant energy

Ionic separation or analysis

250282, 250288, H01J 4926

Patent

active

051855232

ABSTRACT:
A mass spectrometer for analyzing ultra trace element using plasma ion source comprising, a plasma generating means for ionizing sampling gas by generating plasma, a vaccum chamber for taking in ions of the sampling gas from a hole of the vacuum chamber, an ion lens and a mass analyzing portion, and an ion detector for detecting the ions which are passed through the ion lens and the mass analyzing portion, wherein further comprising, a moving mechanism for moving said plasma generating means according to a vacuum degree measured in the vacuum chamber so as to make the sensitivity of the mass spectrometer higher.

REFERENCES:
patent: 4948962 (1990-08-01), Mitsui et al.

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