Mass spectrometer

Radiant energy – Ionic separation or analysis – With sample supply means

Reexamination Certificate

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Details

C250S281000, C250S282000, C250S42300F

Reexamination Certificate

active

06852970

ABSTRACT:
There will be provided a mass spectrometer for detecting impurity in sample gas of a low flow rate. A mass spectrometer including: an atmospheric pressure chemical ionization source having a primary ionization part28for generating a primary ion by means of electric discharge of reagent gas, and a secondary ionization part23for generating an ion of the sample by a reaction of the primary ion and the sample; a mass spectrometric part11for performing mass spectrometric analysis of the ion generated; a mixing portion33for mixing the sample to be introduced into the secondary ionization part with dilution gas; and a mean30for controlling a flow rate of the dilution gas for flowing through the mixing portion; and a mean12-1or12-2or12-3for controlling a flow rate of the sample gas, wherein mixed gas obtained by mixing the sample with the dilution gas is introduced into the secondary ionization part and the sample is ionized.

REFERENCES:
patent: 5969351 (1999-10-01), Nabeshima et al.
patent: 6462336 (2002-10-01), Bajic
patent: 20030122069 (2003-07-01), Kato
patent: 6-310091 (1993-04-01), None

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