Radiant energy – Ionic separation or analysis – With sample supply means
Reexamination Certificate
2011-01-18
2011-01-18
Wells, Nikita (Department: 2881)
Radiant energy
Ionic separation or analysis
With sample supply means
C250S281000, C250S282000
Reexamination Certificate
active
07872227
ABSTRACT:
A side wall35that extends in the axial direction enclosing the plasma in such a way that expansion of plasma to the sides is prevented at the back surface of a skimmer cone33and a small collision chamber36, which is positioned at the back side of this side wall35and is defined by a flat part56of a first electrode53having an opening57through which the ion beam can pass. By means of this small collision chamber36, the pressure inside the chamber rises without introducing additional gas; therefore, argon ions are neutralized by collision and recombination between the ions and electrons and the ion density of the plasma is reduced. Thus, the beam diameter during ion extraction and transport is maintained relatively small.
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Nishijima Takeshi
Yamada Noriyuki
Agilent Technologie,s Inc.
Smith Johnnie L
Wells Nikita
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