Mass sensor and mass sensing method

Details Mass sensor and mass sensing method Mass sensor and mass sensing method

2005-01-11

2005-01-11

Raevis, Robert (Department: 2856)

Measuring and testing

Mass

Reexamination Certificate

active

06840123

ABSTRACT:
A mass sensor is provided, including a sensor substrate, at least one connection plate having a first end attached to a first portion of the sensor substrate and an opposed second end, and at least one diaphragm attached to the second end of the connection plate. Means for changing the mass of the diaphragm is provided on the diaphragm, and at least one sensing plate having a first end attached to a second portion of the sensor substrate and an opposed second end is attached to one of the diaphragm and the connection plate. At least one piezoelectric element is arranged on at least a portion of a surface of the sensing plate. The sensing plate and sensor substrate are arranged in one of a substantially parallel planar or coplanar relationship with respect to one another, and the connection plate, diaphragm, sensing plate and piezoelectric element define a resonance portion.

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