Mass-sensitive sensor

Details Mass-sensitive sensor Mass-sensitive sensor

2005-09-20

2005-09-20

Williams, Hezron (Department: 2856)

Measuring and testing

Gas analysis

By vibration

C073S030040, C073S031050, C073S031060, C073S054410, C073S061450, C073S061750, C073S061790, C073S579000, C310S31300R

Reexamination Certificate

active

06945089

ABSTRACT:
In a mass-sensitive sensor consisting of an acoustic surface wave component on the basis of shear waves, the sensor includes a substrate with an active surface carrying two different layers, one which is a parylene layer of a thickness of between 0.2 and <1.6 μm, which has been produced on the substrate by a vacuum-based deposition method and is capable of generating Love waves and the second layer forms a utilization layer, which interacts with an analyte disposed in a medium contacting the utilization layer.

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