Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-01-24
2006-01-24
Gandhi, Jayprakash N. (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S117000, C708S190000, C438S005000
Reexamination Certificate
active
06990388
ABSTRACT:
A mass-production transfer support system has a mass-production transfer source managing computer for managing information generated in a trial-production process of a semiconductor device and a mass-production transfer destination managing computer for managing a mass-production process of the semiconductor device. The mass-production transfer source managing computer comprises: quality/recipe information input accepting means; quality/recipe information sending means; apparatus-difference correction information input accepting means for accepting an input of apparatus-difference correction information for correcting a difference in the quality of the semiconductor device associated with an apparatus-difference between semiconductor manufacturing apparatuses; apparatus-difference correction information storing means; and apparatus-difference correction information providing means for storing the apparatus-difference correction information in a database accessible by the mass-production transfer destination managing computer.
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Akimori Hiroyuki
Kobayashi Shigeru
Nishimura Hidetaka
Ohyama Yasushi
Gandhi Jayprakash N.
Leydig , Voit & Mayer, Ltd.
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