Mass flowmeter for a gaseous medium, for example air

Details Mass flowmeter for a gaseous medium, for example air Mass flowmeter for a gaseous medium, for example air

1975-10-30

1977-04-05

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

73194M, G01F 138

Patent

active

040154734

ABSTRACT:
A mass flowmeter for gas wherein the absolute pressure at and the pressure differential across a laminar restriction are measured with diaphragms and multiplied, each diaphragm having at least one surface resistance element acting as a strain gauge, the resistance element having a resistance inversely proportional to temperature. The diaphragms and resistance elements are preferably semiconductors.

REFERENCES:
patent: 3349619 (1967-10-01), Millar
patent: 3374674 (1968-03-01), Schartzman
patent: 3838598 (1974-10-01), Tompkins

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