Mass flow verifiers capable of providing different volumes,...

Measuring and testing – Volume or rate of flow – Expansible chamber

Reexamination Certificate

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Reexamination Certificate

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07461549

ABSTRACT:
Embodiments of the present disclosure are directed to systems, methods, and apparatus, including software implementation, useful for high-precision measurement of mass flow rate over a large range of flows by using multiple volumes, each having a different and selected size. Use of a single manometer can facilitate reduced cost, and the use of multiple chamber volumes that are sized according to sub-flow ranges within the overall range of the mass flow verifier, or a related device under test, can provide high accuracy while reducing deleterious effects of noise in the flow measurement.

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