Measuring and testing – Volume or rate of flow – Expansible chamber
Reexamination Certificate
2007-06-27
2008-12-09
Thompson, Jewel V (Department: 2855)
Measuring and testing
Volume or rate of flow
Expansible chamber
Reexamination Certificate
active
07461549
ABSTRACT:
Embodiments of the present disclosure are directed to systems, methods, and apparatus, including software implementation, useful for high-precision measurement of mass flow rate over a large range of flows by using multiple volumes, each having a different and selected size. Use of a single manometer can facilitate reduced cost, and the use of multiple chamber volumes that are sized according to sub-flow ranges within the overall range of the mass flow verifier, or a related device under test, can provide high accuracy while reducing deleterious effects of noise in the flow measurement.
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Ding Junhua
Zarkar Kaveh H.
McDermott & Will & Emery
MKS Instruments Inc.
Thompson Jewel V
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