Mass flow stabilized

Details Mass flow stabilized Mass flow stabilized

1987-06-25

1990-09-25

Chambers, A. Michael

Fluid handling

Systems

Flow path with serial valves and/or closures

137568, 251118, E03B 500

Patent

active

049586580

ABSTRACT:
A mass flow stabilizer utilizes a restriction and a chamber for the dampening of pressure fluctuations between a gas pressure regulator and a mass flow controller.

REFERENCES:
patent: 322002 (1885-07-01), Phillips et al.
patent: 3885590 (1975-05-01), Ford et al.
patent: 4263939 (1981-04-01), Bird
patent: 4341237 (1982-07-01), Stauffer

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