Mass flow sensor

Details Mass flow sensor Mass flow sensor

1991-04-01

1993-04-27

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

052051706

ABSTRACT:
A flow sensor which includes a support structure including a base having a plurality of spaced mesas on a surface thereof is provided. A low thermal conductivity, dielectric diaphragm spanning the mesas is supported along its length thereby and forms an electrical and thermal insulation barrier over the support structure and the mesas. At least one flow sensing element is superposed on the diaphragm so that the flow sensing element is substantially electrically and thermally isolated from the support structure. A method for fabricating the flow sensor is also provided.

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