Mass-flow sensor

Details Mass-flow sensor Mass-flow sensor

1994-02-25

1995-09-26

Chilcot, Jr., Richard E.

Measuring and testing

Volume or rate of flow

Thermal type

7320425, G01F 168

Patent

active

054526108

ABSTRACT:
A mass-flow sensor includes a measuring element on a membrane and a media-temperature measuring element on a separate membrane. By configuring the media-temperature measuring element on a membrane, the mass-flow sensor quickly reacts to changes in the temperature of the flowing medium.

REFERENCES:
patent: 4320655 (1982-05-01), Kammermaier et al.
patent: 4498337 (1985-02-01), Grunner
patent: 4501144 (1985-02-01), Higashi et al.
patent: 4633578 (1987-01-01), Aine et al.
patent: 4696188 (1987-09-01), Higashi
patent: 5108198 (1992-04-01), Furubayashi

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