Mass flow sensor

Details Mass flow sensor Mass flow sensor

1993-06-01

1995-04-11

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

054047536

ABSTRACT:
A mass flow sensor detects the intensity of a media flow. The mass flow sensor includes a measurement chip, with a dielectric membrane and a frame of monocrystalline silicon. At least one heater is arranged on the membrane. The measurement chip is installed in the in-flow channel of a housing. By means of the structure of the housing, contamination of the measurement chip is reduced, thermal equalization with the media flow is improved, the resistance of the sensor to sudden pressure variations is increased, and the dielectric contacts are improved.

REFERENCES:
patent: 4403506 (1983-09-01), Lauterbach
patent: 4548078 (1985-10-01), Bohrer et al.
patent: 4587844 (1986-05-01), Sumal
patent: 4685331 (1987-08-01), Renken et al.
patent: 4829818 (1989-05-01), Bohrer
patent: 4870860 (1989-10-01), Ohta et al.
patent: 4884443 (1989-12-01), Lee et al.
patent: 4976145 (1990-12-01), Kienzle et al.
patent: 5167147 (1992-12-01), Peters

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