Mass flow sensor

Details Mass flow sensor Mass flow sensor

1994-04-15

1995-05-02

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

7320422, G01F 168

Patent

active

054109124

ABSTRACT:
A mass flow sensor is capable of accurately measuring a mass flow irrespective of changes in the ambient temperature. The mass flow sensor includes at least one heating resistor disposed on a portion of a sensor pipe through which a fluid to be measured flows and a housing for the sensor pipe. The heating resistor and a temperature sensitive resistance constitute a bridge circuit. The temperature sensitive resistance is disposed in the housing. The resistance of the sensor changes in accordance with the change in the temperature of the housing to thereby adjust the change in the resistance of the heating resistor. Further, an improved temperature sensitive matching resistor is suitably used in the mass flow sensor, in which a plurality of temperature sensitive resistances having equal characteristics are integrated.

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