Measuring and testing – Volume or rate of flow – Thermal type
Reexamination Certificate
2005-04-26
2005-04-26
Noori, Max (Department: 2855)
Measuring and testing
Volume or rate of flow
Thermal type
Reexamination Certificate
active
06883370
ABSTRACT:
A mass flow meter employs discrete chip-type temperature sensors to sense a fluid flow rate. The sensor can be a semiconductor chip such as SiC or silicon, or thin film tungsten on an AlN substrate. The sensors can be distributed symmetrically with respect to the conduit through which the fluid flows, and can be connected in a four-sensor bridge circuit for accurate flow rate monitoring. An output from the mass flow meter can be used to control the fluid flow.
REFERENCES:
patent: 4366709 (1983-01-01), Eiermann et al.
patent: 4691566 (1987-09-01), Aine
patent: 4744246 (1988-05-01), Busta
patent: 5792952 (1998-08-01), Ritchart
patent: 6131453 (2000-10-01), Sultan et al.
patent: 6208254 (2001-03-01), McQueen et al.
patent: 6550325 (2003-04-01), Inushima et al.
patent: 6557411 (2003-05-01), Yamada et al.
patent: 6644113 (2003-11-01), Kawai et al.
Workshop on Mass Flow Measurement and Control for the Semiconductor Industry, National Inst. of Standards and Technology, May 15-16, 2000, pp. 1-26.
“How to Monitor Mass Flow”, Precision Flow Devices, Inc., Customer Presentation, 1985. (The year of publication is sufficiently earlier than the effective filing date and any foreign priority date.).
Corte Swearingen, Choosing the Best Flowmeter, Cole-Parmer Instrument Co., reprint from Chemical Engineering, Jul. 1999.
Corte Swearingen, “Selecting the Right Flowmeter—Part 2”, Cole-Parmer Instrument Co reprint from Chemicl Engineering, Jan. 2001.
“Basics fo Thermal Mass Flow Control”, Unit Instruments/Kinetics Application Note, Jun., 1999.
“Curve Tracking and Point Matched”, Vishay Intertechnology, Inc., Document No. 33005, May, 2000.
“Mass Flow Controller”, STEC Inc., sales brochure, 1996. (The year of publication is sufficiently earlier than the effective filing date and any foreign priority date.).
Fehlman Thomas E.
Gibson James
Parsons James D.
Vincze Craig A.
Heetronix
Koppel, Jacobs Patrick & Heybl
Noori Max
Thompson Jewel V.
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