Mass flow meter or controller with inclination sensor

Details Mass flow meter or controller with inclination sensor Mass flow meter or controller with inclination sensor

2006-03-16

2008-08-12

Barnes-Bullock, Crystal (Department: 2121)

Measuring and testing

Volume or rate of flow

With indirect temperature or density compensation

C073S001160, C702S045000, C702S050000, C702S100000

Reexamination Certificate

active

07409871

ABSTRACT:
A thermal mass flow meter associated with an inclination sensor that detects an angle of inclination of at least one portion of a thermal mass flow sensor relative to at least one reference axis. Based upon the detected angle of inclination, the output signal of the mass flow meter that is indicative of the mass flow rate of fluid through the sensor may be compensated to account for any inaccuracies relating to the orientation in which the mass flow meter is installed. Inaccuracies for which compensation may be provided include thermal siphoning effects and fluid buoyancy effects. By compensating for such inaccuracies, the mass flow meter may be used in any orientation, and/or may be used in non-inertial (e.g., accelerating) environments. The flow meter may be used as a stand alone device, or incorporated in a thermal mass flow controller.

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