Mass flow meter and mass flow controller

Details Mass flow meter and mass flow controller Mass flow meter and mass flow controller

1991-09-06

1992-08-25

Cohan, Alan

Fluid handling

Line condition change responsive valves

Pilot or servo controlled

1374875, G05D 706

Patent

active

051410214

ABSTRACT:
The output from the sensor detecting the flow rate of the fluid passing through the conduit is compared with the ceiling value and the appointed compensating signal is added to the output from the sensor to display the signal obtained on the basis of this addition result as the value of flow rate or reduce the openness of the control valve on the basis of the above described signal when the output from the sensor is larger than the threshold value, so that the mass flow meter can accurately display the flow rate even when the fluid passes in an excessive flow rate. In addition, even though the mass flow meter and the mass flow controller are fallen into the abnormal operating condition due to an excessive flow rate of fluid, they can be quickly returned to the normal operating condition.

REFERENCES:
patent: 3552428 (1971-01-01), Pemberton
patent: 4487213 (1984-12-01), Gates
patent: 4658855 (1987-04-01), Doyle
patent: 4687020 (1987-08-01), Doyle
patent: 4877051 (1989-10-01), Day
patent: 4921005 (1990-05-01), Ohmi

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