Fluid handling – Line condition change responsive valves – Pilot or servo controlled
Patent
1996-12-02
1998-03-24
Hepperle, Stephen M.
Fluid handling
Line condition change responsive valves
Pilot or servo controlled
73200, G05D 706
Patent
active
057301816
ABSTRACT:
A mass flow controller and purifier has a canister arranged at right angles to a flow path through the mass flow controller. The canister holds a contaminant scavenging material which a gas stream contacts as it flows to remove a contaminant such as water. A purified process gas stream is fed through a bypass of a mass flow meter. A portion of the gas is supplied to a mass flow sensor which generates a signal indicative of a rate of mass flow. The mass flow signal is amplified and the amplified mass flow signal is linearized in a linearizer. The linearized mass flow signal is fed to a comparator which compares the linearized mass flow signal with an error signal and provides an output signal indicative of a mass rate of flow through the mass flow meter. A valve is connected to the mass flow meter and is controlled by the mass flow meter signal to meter the gas.
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Doyle Michael J.
Urdaneta Nelson
Vu Kim N.
Hepperle Stephen M.
Unit Instruments, Inc.
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