Mass flow controller with supplemental condition sensors

Details Mass flow controller with supplemental condition sensors Mass flow controller with supplemental condition sensors

1990-11-13

1992-07-14

Cohan, Alan

Fluid handling

Line condition change responsive valves

Pilot or servo controlled

1374875, G05D 706

Patent

active

051294184

ABSTRACT:
An improved mass flow controller can be connected to a passageway of a fluid, and can utilize a sensor unit for measuring a characteristic of the mass flow, and deriving a corresponding flow rate signal. Supplemental condition sensors can measure other parameters of the flow rate independent of their utilization in determining the actual flow rate, and can monitor and compare the current value of these sensor conditions, with standards to thereby monitor the operational performance of the mass flow controller.

REFERENCES:
patent: 4146051 (1979-03-01), Sparks
patent: 4394871 (1983-07-01), Czajka
patent: 4487213 (1984-12-01), Gates

Affiliated with

Also associated with

Rating

Mass flow controller with supplemental condition sensors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Mass flow controller with supplemental condition sensors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Mass flow controller with supplemental condition sensors will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-329758