Mass flow controller with improved dynamic

Details Mass flow controller with improved dynamic Mass flow controller with improved dynamic

2011-03-15

2011-03-15

Thompson, Jewel (Department: 2855)

Measuring and testing

Volume or rate of flow

Proportional

Reexamination Certificate

active

07905139

ABSTRACT:
A system and method of compensating for pressure variations in a flow controller entails the use of the compressibility of the gas being controlled to provide a more accurate measurement of the flow.

REFERENCES:
patent: 6155283 (2000-12-01), Hansen et al.
patent: 6158679 (2000-12-01), Ohmi et al.
patent: 6178995 (2001-01-01), Ohmi et al.
patent: 6216726 (2001-04-01), Brown et al.
patent: 6217506 (2001-04-01), Phillips et al.
patent: 6289923 (2001-09-01), Ohmi et al.
patent: 6302130 (2001-10-01), Ohmi et al.
patent: 6314992 (2001-11-01), Ohmi et al.
patent: 6343617 (2002-02-01), Tinsley et al.
patent: 6389364 (2002-05-01), Vyers
patent: 6404612 (2002-06-01), Pattantyus
patent: 6845659 (2005-01-01), Lull
patent: 7107834 (2006-09-01), Meneghini et al.
patent: 7272512 (2007-09-01), Wang et al.
patent: 7273063 (2007-09-01), Lull et al.
patent: 7380564 (2008-06-01), Lull et al.
patent: 2003/0234047 (2003-12-01), Shajii et al.
patent: 0110325 (1983-11-01), None
patent: 0281947 (1988-03-01), None
patent: 0834723 (1998-04-01), None
patent: 0890828 (1998-07-01), None

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