Mass flow controller, operating method and electromagnetic valve

Details Mass flow controller, operating method and electromagnetic valve Mass flow controller, operating method and electromagnetic valve

1994-07-22

1995-09-05

Nilson, Robert G.

Fluid handling

Processes

With control of flow by a condition or characteristic of a...

137486, 1374875, 25112908, G05D 706

Patent

active

054471737

ABSTRACT:
A mass flow controller comprising (a) a valve casing having a flow path for a fluid; (b) an electromagnetic actuator comprising a stationary yoke made of a soft magnetic material, an electromagnetic coil for magnetizing the stationary yoke, and a movable yoke made of a soft magnetic material and movable toward the stationary yoke, both of the stationary yoke and the movable yoke having a magnetic flux density of 1.5 T or more at 300 AT/m, whereby the temperature elevation of the valve casing is within 4.degree. C. from ambient temperature when the electromagnetic coil is energized; (c) a diaphragm valve means disposed in the flow path for adjusting the degree of opening the flow path; (d) a sensor pipe disposed on the upstream side of the diaphragm valve means and bypassing the flow path; and (e) a pair of sensor coils wound around the sensor pipe on the upstream and downstream sides.

REFERENCES:
patent: 4921005 (1990-05-01), Ohmi
patent: 4984460 (1991-01-01), Isoda
patent: 5062446 (1991-11-01), Anderson
patent: 5100100 (1992-03-01), Benson
"A calibration system for calorimetric mass flow devices", Widmer et al., J. Phys. E. Sci. Instrum., vol. 15, pp. 213-219, 1982.

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