Mass flow controller having automatic pressure compensator

Details Mass flow controller having automatic pressure compensator Mass flow controller having automatic pressure compensator

1999-07-28

2000-10-31

Michalsky, Gerald A.

Fluid handling

With heating or cooling of the system

With electric heating element

137486, 1374875, G05D 706

Patent

active

061387088

ABSTRACT:
The present invention is directed to a mass flow controller having an automatic pressure compensator in the form of a dome loaded pressure regulator, wherein the dome loaded pressure regulator is, in turn, controlled by a dome-loading gas line regulated by a pilot pressure regulator. The pilot pressure regulator and the mass flow controller are advantageously controlled by a single microprocessor, and may advantageously all be mounted to a single manifold block.

REFERENCES:
patent: 5687759 (1997-11-01), Tan

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