Measuring and testing – Volume or rate of flow – Thermal type
Reexamination Certificate
2011-07-05
2011-07-05
Patel, Harshad (Department: 2855)
Measuring and testing
Volume or rate of flow
Thermal type
C073S202500
Reexamination Certificate
active
07971480
ABSTRACT:
One embodiment of the present invention involves a thermal sensor and a method of using the same. One thermal sensor is adapted to output a signal which is unaffected by external longitudinal and orthogonal thermal gradients. In one embodiment, the mass flow controller thermal sensor comprises a capillary tube having an upstream tube portion, a tube bend portion, and a downstream tube portion, the downstream portion being substantially parallel to the upstream portion. A distance between the upstream tube portion and the downstream tube portion in one embodiment is no greater than half the upstream portion and downstream portion lengths, a first pair of thermal sensing elements are coupled to the upstream tube portion and a second pair of thermal sensing elements are coupled to the downstream tube portion.
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Clark, Stephen, “International Search Report re Application No. PCT/US09/060415”, Dec. 7, 2009, Published in: PCT.
Mauck Justin
McDonald R. Mike
Smirnov Alexei V.
Hitachi Metals Ltd.
Neugeboren O'Dowd PC
O'Dowd Sean R.
Patel Harshad
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