Mass flow controller for control purge and managing method...

Details Mass flow controller for control purge and managing method... Mass flow controller for control purge and managing method...

2005-01-18

2005-01-18

Patel, Harshad (Department: 2855)

Measuring and testing

Volume or rate of flow

Proportional

C073S204210, C702S045000

Reexamination Certificate

active

06843122

ABSTRACT:
The present invention relates to a mass flow controller for a control purge and a managing method of the same. When a user sets the mode to a control purge mode capable of controlling a maximum flowing amount for constantly maintaining a maximum flowing amount when performing a purge function after the user sets a purge function mode based on a purpose of use of a mass flow controller, a control circuit compares a set value of a flowing amount inputted based on a user's selection with a previously set threshold value and controls a valve for constantly maintaining a maximum flowing amount by switching to a gain resistor for a purge mode having a gain value capable of performing a purge function and controls a valve for thereby accurately controlling a small flowing amount by switching to a gain resistor for a common control mode having a gain value capable of performing a common control function. When a user sets the mode to a purge function mode based on a state of use of a mass flow controller, fully opens a valve and sets a valve open purge mode for obtaining a maximum flowing amount, a control circuit compares a set value of a flowing amount inputted by a user with a previously set threshold value and controls a valve for fully opening a valve for thereby implementing a maximum flowing amount and accurately controlling a small flowing amount.

REFERENCES:
patent: 4369031 (1983-01-01), Goldman et al.

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