Mass flow controller apparatus

Details Mass flow controller apparatus Mass flow controller apparatus

1982-09-09

1984-12-11

Chambers, A. Michael

Fluid handling

Processes

With control of flow by a condition or characteristic of a...

137486, 1374875, 73204, G01F 168

Patent

active

044872135

ABSTRACT:
An apparatus capable of selecting and controlling the mass flow rate of a gas to be substantially constant over extended periods of time at very low flow rates and very low gas partial pressures is disclosed.

REFERENCES:
patent: 3520312 (1970-07-01), Ackerman et al.
patent: 3650151 (1972-03-01), Drexel
patent: 3650505 (1972-03-01), Drexel
patent: 3938384 (1976-02-01), Blair

Affiliated with

Also associated with

Rating

Mass flow controller apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Mass flow controller apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Mass flow controller apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1458350