Mass flow controller

Details Mass flow controller Mass flow controller

1987-06-30

1989-01-03

Cohan, Alan

Fluid handling

Line condition change responsive valves

Pilot or servo controlled

1374875, G05D 706

Patent

active

047949473

ABSTRACT:
A mass flow controller includes a mass flow control unit connected to a mid portion of a conduit, the mass flow control unit having a by-pass and a mass flow sensor on the upstream side thereof and a flow regulating valve on the downstream side thereof. The mass flow sensor is communicated with the flow regulating valve through an automatic controlling circuit. The by-pass and the mass flow sensor as well as the flow regulating valve are arranged such that they are successively disposed in series in a straight-line manner from the upstream side to the downstream side of the mass flow control unit.

REFERENCES:
patent: 3529620 (1970-09-01), Leiber
patent: 4199981 (1980-04-01), Young
patent: 4487213 (1984-12-01), Gates
patent: 4541610 (1985-09-01), Reynolds
patent: 4542650 (1985-09-01), Renken et al.
patent: 4595171 (1986-06-01), Torrence
patent: 4690371 (1987-09-01), Bosley

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