Mass flow controller

Details Mass flow controller Mass flow controller

1991-10-15

1992-11-03

Cohan, Alan

Fluid handling

Line condition change responsive valves

Pilot or servo controlled

1374875, 251282, G05D 706

Patent

active

051599511

ABSTRACT:
A mass flow controller having a bypass portion provided in a body through which a large amount of gas is passed and a sensor portion, laid between a primary chamber which is an inlet of the bypass portion and a secondary chamber which is an outlet of the bypass portion, through which gas flows at a small flow rate proportional to the flow rate of the gas passed through the bypass portion and capable of measuring the total flow rate of gas by measuring the flow rate in the sensor portion. The body is partitioned by a bulkhead into a primary chamber and a secondary chamber. The primary chamber is provided with an inlet for gas inflow and the secondary chamber is provided with an outlet for gas outflow. The bulkhead is provided with a plurality of through holes for connecting the primary chamber to the secondary chamber, and bypass elements selected depending on the flow rate in the bypass portion are fitted in the through holes in the bulkhead. Expansion plugs are fitted in the through holes in which no bypass elements are fitted not to cause gas to flow.

REFERENCES:
patent: 3730215 (1973-05-01), Connery
patent: 3732889 (1973-05-01), Conery et al.
patent: 4282897 (1981-08-01), de May
patent: 4921005 (1990-05-01), Ohmi

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