Mass flow controller

Details Mass flow controller Mass flow controller

1989-06-15

1990-12-18

Cohan, Alan

Fluid handling

Processes

With control of flow by a condition or characteristic of a...

137486, 1374875, 20419212, G05D 700

Patent

active

049779168

ABSTRACT:
A mass flow controller including a valve assembly wherein a flow rate-controlling portion of the valve assembly is mirror finished and wherein the maximum flow rate through the flow rate-controlling portion during the time that the flow rate is not being controlled is set so as to be sufficiently large in comparison with the flow rate during control whereby a moisture purging function may be performed without external fluid bypass circuits.

REFERENCES:
patent: 4099703 (1978-07-01), Lush
patent: 4278234 (1981-07-01), Baumann
patent: 4585209 (1986-04-01), Aine
patent: 4687020 (1987-08-01), Doyle
patent: 4858643 (1989-08-01), Vavra

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