Mass flow controller

Details Mass flow controller Mass flow controller

1989-06-15

1990-05-01

Cohan, Alan

Fluid handling

Line condition change responsive valves

Pilot or servo controlled

7320425, G01F 168, G01D 700

Patent

active

049210050

ABSTRACT:
A mass flow container wherein the resistive wires wound about the conduit of a flow meter portion are provided with a current in a direction such that the magnetic field produced by the current is opposite in direction to the flow of fluid through the conduit and wherein a flow rate-controlling portion includes a valve assembly that is mirror-finished.

REFERENCES:
patent: 3938384 (1976-02-01), Blair
patent: 4487213 (1984-12-01), Gates
patent: 4517838 (1985-05-01), Wachi
patent: 4519246 (1985-05-01), Hartemink
patent: 4695034 (1987-09-01), Shimizu et al.

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