Mass flow controller

Details Mass flow controller Mass flow controller

1990-09-10

1992-01-14

Cohan, Alan

Fluid handling

Systems

Dividing into parallel flow paths with recombining

137486, 1374875, 7320421, 138 44, G05D 700

Patent

active

050801317

ABSTRACT:
A mass flow controller having a bypass portion provided in a body through which a large amount of gas is passed and a sensor portion, laid between a primary chamber which is an inlet of the bypass portion and a secondary chamber which is an outlet of the bypass portion, through which gas flows at a small flow rate proportional to the flow rate of the gas passed through the bypass portion and capable of measuring the total flow rate of gas by measuring the flow rate in the sensor portion. The body is partitioned by a bulkhead into a primary chamber and a secondary chamber. The primary chamber is provided with an inlet for gas inflow and the secondary chamber is provided with an outlet for gas outflow. The bulkhead is provided with a plurality of through holes for connecting the primary chamber to the secondary chamber, and bypass elements selected depending on the flow rate in the bypass portion are fitted in the through holes in the bulkhead. Expansion plugs are fitted in the through holes in which no bypass elements are fitted not to cause gas to flow.

REFERENCES:
patent: 3349619 (1967-10-01), Millar
patent: 4241896 (1980-12-01), Voege
patent: 4858643 (1989-08-01), Vavra

Affiliated with

Also associated with

Rating

Mass flow controller does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Mass flow controller, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Mass flow controller will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-534587