Mass airflow sensor with backflow detection

Details Mass airflow sensor with backflow detection Mass airflow sensor with backflow detection

1984-12-06

1985-12-31

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

29573, 156644, 156662, 427123, G01F 168, H01L 3500

Patent

active

045613036

ABSTRACT:
A mass airflow sensor with backflow detection includes a first, second, and third elongated, relatively thin silicon members generally parallel to each other and spaced from each other in an orienting plane. The second silicon member, between the first and third silicon members, has a metal coating for carrying a heating current. The first and third silicon members each have a thermocouple formed thereon so as to detect temperature differences on either side of the second silicon member and thus the direction of airflow across the metal second silicon member.

REFERENCES:
patent: 4129848 (1978-12-01), Frank et al.
patent: 4373386 (1983-02-01), Suhuddemat
patent: 4478076 (1984-10-01), Bohrer
patent: 4478077 (1984-10-01), Bohrer et al.
"Silicon Micromechanical Devices", by James B. Angell, Stephen C. Terry and Phillip W. Barth, Scientific American Magazine, Apr. 1983, pp. 44-55.

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