Mass airflow sensor

Details Mass airflow sensor Mass airflow sensor

1984-12-06

1986-06-17

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

045948895

ABSTRACT:
A mass airflow sensor includes a silicon substrate with integral, thin, elongated silicon members between openings through the silicon substrate. A silicon dioxide coating and a metal coating on the silicon member adapt it to function as a hot wire mass airflow sensor.

REFERENCES:
patent: 3996799 (1976-12-01), van Putten
patent: 4129848 (1978-12-01), Frank et al.
patent: 4343768 (1982-08-01), Kimura
patent: 4399698 (1983-08-01), Hiromasa et al.
patent: 4448070 (1984-05-01), Ohyama et al.
patent: 4478076 (1984-10-01), Bohrer
patent: 4478077 (1984-10-01), Bohrer et al.
patent: 4498337 (1985-02-01), Gruner
Malin et al., "Mass Flow Meter" in IBM Technical Disclosure Bulletin, vol. 21 #8 1/79, p. 3227.
"Silicon Micromechanical Devices" by James B. Angell, Stephen C. Terry and Phillip W. Barth, Scientific American Magazine, Apr. 1983, pp. 44-55.

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